Hermetically sealed electronic components leak test system is a system that automatically performs leak tests of various small electronic components in which a hermetic condition is required such as crystal oscillators, ceramic oscillators, MEMS, SAW filters, and small relays. Two types of inspections; gross leak test (air leak test) for measuring large leaks and fine leak test (helium leak test) for measuring minute leaks are generally performed for leak inspections of minute electronic components. FUKUDA provides a lineup of inspection systems for large amount and small amount of work according to the request of our customers.
A system to measure gross leak of minute electronic components (MEMS device, quartz oscillator, etc.) of 2.0mm×1.6mm size minimum in full automatic operation. It is capable of performing high-speed test of 0.5 seconds per piece.
Measurement accuracy: 2.0×10-7Pa･m3/sec（equivalent standard leak）
Full automatic leak test system for performing leak test of minute electronic components such as MEMS, SMD and relay. Leak test from large leak to minimum of 1×10-10Pam3 / sec is possible with this unit. Furthermore, controlling of helium charging time and exposure time is possible